RF power supply is mainly used to produce plasma at low or normal pressure. Due to different plasma gases with different chemical properties, such as oxidising high oxygen plasma, photoresist can generate gas oxidation reaction, so as to achieve the effect of cleaning, to glue machine such as a semiconductor device; plasma etching gas is anisotropic good, so that we can meet the need of etching. Such as etching machine in semiconductor equipment.
Radio frequency power supply has been widely used in semiconductor process equipment; LED and solar photovoltaic industry; plasma in scientific experiments; radio frequency induction heating; medical beauty; atmospheric pressure plasma cleaning, etc..
At present, the longest time to do radio frequency power supply, the most stable performance, the highest market share is the Chinese Academy of Microelectronics Institute of RFG series solid state RF power supply (300W-3000W) and SY type tube RF power supply (500W-10KW).